A^IIIB^V Compounds

Sapphire Wafers

Thin-film Coated Wafers

Sputtering Targets and
Evaporation Materials

Chrome Mask Blanks

Optical Component

_{- Optical Lens}

Chrome Mask Blanks

Substrate

Soda Lime
Quartz

Size

2" to 7" square

Thickness

0.02" to 0.25" (0.5mm to 6mm)

Flatness

Quartz: < 5um
Soda lime: <6um

Film Specification

CHROME	Vacuum Deposited, DC Sputtered in Class 100 Environment
THICKNESS/ OPTICAL DENSITY	Standard: 1000Å± 8% / O.D.=3.0±0.2 @ 450nm Custom Thicknesses up to 5 µm
REFLECTIVITY		CHROME
	LOW	<12% @ 400nm
	MID	<33% @400nm
	HIGH	<55% @400nm
PROCESS	Etchable in all conventional Wet Etch systems.Plasma Grade recommended for Dry Etch systems
PHOTORESIST	Shipley 1800 or AZ 1500 filtered to 0.2 micron at point of use. All widely used positive and negative optical and E-beam resist available

MATERIALS

Semiconductor Si wafers and Solar wafers
Silicon on insulator (SOI) wafers
Mask blanks (soda lime and quartz)
Glass wafers (Pyrex 7740, quartz, soda lime, etc)
A^IIIB^V compounds (GaAs, GaP, InP, InAs, etc)
Sapphire wafers
Sputtering targets
Thin films-Oxide, nitride
Packing boxes for crystal, wafers, filter, chip, etc
Optical component

SERVICES

Fabrication of soda lime/quartz photolithographic masks
Silicon microfabrication (wet etching, dry etching and wafer bonding)
Consultancy of fabrication process
Characterization of microdevices/microsystems
Consultancy of microfluidics and biological microdevices

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    Tel.: +65-6515 8750
    Fax : +65-6515 8795
    Email: sales@bondatek.com